Waveguide

Waveguides are used to precisely channel microwave energy to heat plasma or excite superconducting cavity resonators. In systems like tokamaks or linear accelerators, they are vital for low-loss RF coupling under ultra-high vacuum conditions.

In plasma systems for coating or etching, waveguides feed energy into the process chamber. Their field-optimized geometry ensures stable and homogeneous plasma states – for instance in PECVD or RIE systems used for microchips and sensors.

For powering gas lasers (e.g., CO₂, excimer, or Nd:YAG lasers), waveguides serve as RF feed lines. They enable low-loss energy transmission for initiating laser discharges, often at high power and in continuous operation.

In industrial plasma systems for surface activation, sterilization, or material modification, waveguides reliably transmit the RF power into the process chambers. They are particularly stable and durable when exposed to aggressive media and high thermal demands.