Sputter Head

Sputter Head

High-Performance Module for Precision Coating


The developed sputter head is a highly complex component for precision material coating in high-performance sputtering systems operating under intense ionizing radiation. It deliberately avoids the use of plastic insulation. Instead, a grounded target cooling system using high-conductivity ceramic is applied, vacuum-brazed between two copper plates.

This innovative multi-layer construction combines features such as high-voltage feedthrough, magnetic flux control, and highly efficient cooling. The core is made of ferromagnetic steel with two additional layers for magnetic field modulation. The system provides high magnetic flux densities up to 44 µT while ensuring reliable cooling (up to 2 kW).

Applications

Microchips, transistors, precise thin films

Sensors, displays, optical coatings

Coating of superconducting or ferromagnetic materials

High-temperature and mechanically resistant components

Industries

Key Features

  • Multi-Layer Design: Different material, processing, and joining requirements
  • Magnetic Flux Control: Precise adjustment for homogeneous flux densities up to 44 µT
  • Target Cooling: Cooling capacity up to 2 kW without compromising insulation
  • High-Voltage Feedthrough: Safety at 2 kV with optimized insulation
  • Magnetic Shielding: Directed field distribution, no external interference
  • Material Selection: Corrosion-resistant for plasma or vacuum environments
  • Joining Technologies: Vacuum brazing, laser or TIG welding
  • Thermal Stress: Low-stress joints with differing thermal expansion
  • Homogeneity: High precision for consistent magnetic field distribution
  • Cooling Channels: Complex structures efficiently manufactured
  • Vacuum Suitability: UHV-compliant materials and joining techniques
  • Quality Assurance: Leak tests, magnetic field measurements, high-voltage and thermal tests

The custom-designed sputter head for strongly ionizing environments meets the highest standards of precision, performance, and safety. With its multi-layer structure, targeted magnetic flux control, robust cooling, and vacuum-compatible design, it is a key component in semiconductor technology, materials research, and advanced coating systems.

Contact

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REUTER TECHNOLOGIE GmbH
Röntgenstraße 1 - D-63755 Alzenau

+49 6023 5044-0
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