Quantitative residual gas analysis – measuring the cleaning level of vacuum components

The quantitative residual gas analysis provides information about the suitability of a part or a material for application in a vacuum. The efficiency of various cleaning processes can be compared to each other and the pump system can be optimally dimensioned. REUTER TECHNOLOGIE has employed the quantitative residual gas analysis based on mass spectrometry for many years for the development of our own assemblies and components. Use our know-how and our longstanding experience to examine the outgassing behaviour of your components. We determine the outgassing rate in the unit mbar∙l∙s-1∙cm-2, so that the values are scalable to any surfaces.

Residual gas analysis under clean room conditions
Residual gas analysis under clean room conditions
Analysis of residual gas spectra by REUTER TECHNOLOGIE
Analysis of residual gas spectra by REUTER TECHNOLOGIE

Our services for quantitative residual gas analysis:

  • Quantitative residual gas analysis of parts (determination of the outgassing elements and their rate in mbar∙l∙s-1∙cm-2)
  • Measurement report including detail spectrums (optional, sample report on request)
  • Test certificate (optional, if specification is available, lower detection limits (LDL) are taken into account)
  • Suitability testing of components, which have already been qualified in air (e.g. sensors) for vacuum application
  • Determination of the outgassing behaviour of materials under vacuum conditions

Interesting to know

The final pressure in vacuum systems

In principle, any base pressure can be reached, if a sufficiently high pumping speed of the vacuum pump is selected. Those who prefer not to oversize their pump system and would like to work in a cost-efficient manner, can alternatively optimize the outgassing rates of the surfaces in the vacuum by appropriate surface treatment methods and cleaning procedures. Further details on this are available in“Wutz – Handbuch Vakuumtechnik“, Karl Jousten (editor), 11th edition 2012, Chapter 17.

The influencing parameters that determine the final pressure of a vacuum chamber are represented in the following formula, which can be used to calculate the base pressure in a simplified way:

The designations are as follows:
Pend: Vacuum final pressure in the chamber - [pend] = mbar
A: Outgassing area in the vacuum - [A] = cm2
S: Pumping speed of the vacuum pump – [S] = l∙s-1
R: Outgassing rate(s) on the surface(s) – [R] = mbar∙l∙s-1∙cm-2
(values e.g. from GSI)

Use our know-how and longstanding experience to examine the outgassing behaviour of your parts. Just contact us.